Report date: Apr 16, 2024 Conflict count: 351559 Publisher: Elsevier Title count: 937 Conflict count: 15202 ========================================================== Created: 2004-12-15 01:52:16.0 ConfID: 4659394 CauseID: 137032350 OtherID: 46142130 JT: Microelectronic Engineering MD: null,null,null,null,2004,Contents DOI: 10.1016/j.mee.2003.12.007(Journal) (4659394-N ) DOI: 10.1016/j.mee.2004.07.010(Journal)